Design of a trajectory contour controller for a dual‐axis precision motion stage based on improved iterative learning

To solve the problem of contour error (CE) arising from dual-axis coupling X–Y coordinate planar motor stage under reciprocating motion conditions in integrated circuit (IC) manufacturing, following two perspectives are considered: indirect intervention a single-axis servo tracking (TE) control and direct cross-coupling (CCC). An improved controller is designed using iterative learning (ILC) principle conjunction with characteristics mechanism. Specifically, variable gain forgetting factor (VFF-VGILC) to address trajectory repetition velocity planning coupling. The significance VFF-VGILC increase bandwidth single axis. On other hand, cross-coupled (CCILC) on cross-coupling, while pre-compensation strategy introduced CCC structure form pre-CCILC. After experimental designing testing performed, can effectively reduce CE various movements compared traditional controller. curves drawn meet requirements better enhance capability